Abstract: We demonstrate a fiber-optic micro-electron-mechanical systems (MEMS) accelerometer based on a symmetric push-pull spring structure made by micromachining on a silicon substrate, which ...
Abstract: A compact optical fiber Fabry–Perot (FP) accelerometer was designed for microvibration measurements in the low-frequency band below 1 Hz. A double-spring-supported spring-mass oscillator was ...
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