Abstract: This letter demonstrates a high-responsivity piezoelectric resonant MEMS accelerometer using a bent-TBTF resonator. Different from the conventional bent-beam resonant accelerometers, the ...
Abstract: This paper reviews the development of silicon resonant accelerometers from 1987 to 2022. For more than 30 years, silicon resonant accelerometers have developed into varieties of structures ...
To ensure and expand sustainable mobility solutions, the transport of passengers and cargo requires high-performing, seamlessly integrated monitoring and control systems. High-capacity transportation ...
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